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'Power of disorder' tames CF₄, a semiconductor greenhouse gas that can persist for 50,000 years

'Power of disorder' tames CF₄, a semiconductor greenhouse gas that can persist for 50,000 years
Phys.org Thursday 03 September 2026, 20:30 UTC 1 min read
Key Points

Among the gases used in semiconductor manufacturing, tetrafluoromethane (CF₄) is a greenhouse gas more than 6,000 times as potent as carbon dioxide.

Among the gases used in semiconductor manufacturing, tetrafluoromethane (CF₄) is a greenhouse gas more than 6,000 times as potent as carbon dioxide.
tetrafluoromethane (ORG)
Originally published by Phys.org Read original →

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