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Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
arXiv:2606.04607v1 Announce Type: new Abstract: High density threading dislocations in SiC wafers facilitate reverse leakage and degradation, yet commercial defect inspection systems based on surface profiling and PL dark-contrast miss nanoscale TDs because they lack resolvable surface signatures and band-edge PL is uniformly quenched by background dopants or compensating defects. Here, we develop confocal subsurface backscattering microscopy to nondestructively detect TDs, based on the...