Collisionless Bulk Electron Heating
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Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
arXiv:2606.09493v1 Announce Type: new Abstract: We investigate collisionless power absorption in resonant, low$-$pressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almost exactly balances the plasma inductance, driving the total RF discharge voltage down to just a few volts. However, plasma persists not only in this ultra$-$low$-$voltage regime; it also generates ions that strike the electrodes with kinetic energies substantially...