Einzel
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Design and electron optics performance of a MEMS electrostatic electron monochromator
arXiv:2606.09423v1 Announce Type: new Abstract: Monochromators are routinely used in Transmission Electron Microscopy and Electron Energy Loss Spectroscopy, to improve both spatial and energy resolution. State-of-the-art monochromators, however, are complex instruments that typically require additional electron optical correctors, limiting their implementation to the high-end, most expensive microscopes. Miniaturized monochromation relying on purely electrostatic fringe fields has recently...