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Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform

arXiv Physics Wednesday 03 June 2026, 03:43 UTC By Shahid Rauf, Tianhong Wang, Jason Kenney, Dmytro Sydorenko, Igor D. Kaganovich 1 min read
Key Points

arXiv:2606.02736v1 Announce Type: new Abstract: Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on plasma characteristics, collision processes, and the electron velocity distribution function driven by asymmetric triangular waveform current.

arXiv:2606.02736v1 Announce Type: new Abstract: Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on plasma characteristics, collision processes, and the electron velocity distribution function driven by asymmetric triangular waveform current.
ICP (ORG)
Originally published by arXiv Physics Read original →

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